我们发布了电子束光刻系统“ELS-HAYATE”
2023-02-01

这是最新型号,具有业界最快的 400MHz 扫描频率和业界最大的 5mm 视场尺寸。

此外,我们将实现高吞吐量的高质量绘图。
 

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This is the latest model with the industry's fastest 400MHz scan clock and the industry's largest field size of 5mm batch drawing, high-current electron optical system with a maximum beam current of 800nA. 
 
Furthermore, we will realize high-quality drawing with high throughput.